Filtering for 5G (Update 2021) – AlScN and Electrode Metal Deposition for Advanced BAW Filters
Dec 15, 2021In this webinar we present the latest PVD technology solutions to deposit very thin highly doped layers of AlN, and the associated electrode metals. We discuss how to control the critical aspects of doped AlN deposition such as the control of mis-orientated grains and most importantly the control of the stress state of the piezo layer.
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